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发明名称
apparatus for etching
摘要
申请公布号
KR100781998(B1)
申请公布日期
2007.12.06
申请号
KR20060022566
申请日期
2006.03.10
申请人
发明人
分类号
H01L21/302;H01L21/02
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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