| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition for a silicon wafer-conveying tool, which is excellent in injection molding property, has high mechanical strength, high impact resistance, moderate hardness and a moderate cushioning property and has low contents of various ions, and the silicon wafer-conveying tool using the same. SOLUTION: The resin composition for the silicon wafer-conveying tool comprises 5-100 pts.wt. polyester block copolymer (A) and 95-0 wt.% aromatic polyester resin and has a flexural modulus measured according to ASTM D790 of 800-2,000 MPa. When Y g (Y is a positive number) of the resin composition in a pellet form is left at rest in Y mL (Y is a positive number) of water having an electric conductivity at 25°C of <0.1μS/cm at a room temperature for 24 hr and subsequently filtered, the resulting extracting water has ion concentrations satisfying at least one chosen from≤20 ppb chlorine ion concentration,≤20 ppb sulfate ion concentration,≤20 ppb sodium ion concentration and≤20 ppb calcium ion concentration. COPYRIGHT: (C)2008,JPO&INPIT |
