| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum suction pad capable of keeping close contact between a pad member and a bellows member stably, and replacing the pad member. SOLUTION: The vacuum suction pad 11 is provided with a base member 13 with an exhaust passage 12 formed inside, the bellows member 14 integrally attached to the base member 13, the inside of which is communicated with the exhaust passage 13, and the pad member 15 attached to the front end 14b of the bellows member 14 and having a suction hole 15a. The pad member 15 is provided with a fitting shaft part 15b fitted in the front end 14b of the bellows member 14 while having the suction hole 15a formed inside. Moreover, an annular elastic member 17 retaining the close contact condition relative to the fitting shaft part 15b is fitted in the front end 14b of the bellows member 14. COPYRIGHT: (C)2008,JPO&INPIT |
