发明名称 Semiconductor device with bulb recess and saddle fin and method of manufacturing the same
摘要 A semiconductor device includes an active region, a bulb recess with a certain depth formed in a channel-forming region of the active region, a device isolation structure encompassing the active region, wherein the device isolation structure has a line-shaped opening such that a surface of the device isolation structure is lower than the bottom of the bulb recess and a portion of the active region is protruded more than the device isolation structure in the shape of a saddle fin, a gate insulating layer formed over the device isolation structure exposed by the opening and the active region including the bulb recess, and a gate electrode formed over the gate insulating layer, the gate electrode filled in the bulb recess and covering the device isolation structure exposed by the opening.
申请公布号 US2007281455(A1) 申请公布日期 2007.12.06
申请号 US20060646301 申请日期 2006.12.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM KWANG-OK
分类号 H01L21/3205 主分类号 H01L21/3205
代理机构 代理人
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