| 发明名称 |
LINEAR MOTOR, MANUFACTURING METHOD THEREOF, STAGE APPARATUS, AND EXPOSURE APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To more positively prevent generation of insulation failure due to contact of a conductive liquid to a coil body. <P>SOLUTION: A linear motor is disposed facing a flow passage 142 of a liquid X in a surrounding member 141 and includes a coil unit 150 having at least one part contacting the liquid X. The coil unit 150 includes a coil body 151; a liquid proof layer 153 for having liquid proof performance against the liquid X and covering the coil body 151; and a sealing member to be impregnated by the liquid proof layer 153. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2007318835(A) |
申请公布日期 |
2007.12.06 |
| 申请号 |
JP20060142839 |
申请日期 |
2006.05.23 |
| 申请人 |
NIKON CORP |
发明人 |
KOMINAMI TADAHIRO;KAGEYAMA SHIGEKI;ITO HIROSHI;MORIMOTO SHIGE |
| 分类号 |
H02K41/02;H01L21/027;H02K15/12 |
主分类号 |
H02K41/02 |
| 代理机构 |
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代理人 |
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