VACUUM ROBOT, VACUUM MOTOR FOR VACUUM ROBOT, AND PRODUCTION METHOD OF SAID VACUUM MOTOR

摘要

A vacuum robot includes an arm portion on which a work is to be disposed under a reduced pressure environment and a motor portion for rotatably driving the arm portion, the vacuum robot being configured to transfer the work by causing a rotational movement of the arm portion by the motor portion. The motor portion comprises a rotor portion connected to the arm portion, a stator portion disposed at an external periphery of the rotor portion, a housing disposed under an atmospheric pressure environment, and a thin cylindrical can disposed in an electromagnetic gap formed between the rotor portion and the stator portion and secured to the housing so that the stator portion is air-tightly encapsulated in a space formed by the housing and the can. The space is maintained in a depressurized state by a seal.