PATTERNING BY ENERGETICALLY-STIMULATED LOCAL REMOVAL OF SOLID-CONDENSED-GAS LAYERS AND SOLID STATE CHEMICAL REACTIONS PRODUCED WITH SUCH LAYERS

摘要

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam energy at the selected regions. The structure can be processed, with at least a protion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed.Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.