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发明名称
VERFAHREN ZUR HERSTELLUNG EINER GRABENISOLATION FÜR ELEKTRISCH AKTIVE BAUELEMENTE
摘要
申请公布号
DE50014729(D1)
申请公布日期
2007.12.06
申请号
DE20005014729
申请日期
2000.03.13
申请人
INFINEON TECHNOLOGIES AG
发明人
UHLIG, INES;ZIMMERMANN, JENS;WEGE, STEPHAN
分类号
H01L21/762;H01L21/3065
主分类号
H01L21/762
代理机构
代理人
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