| 摘要 |
PROBLEM TO BE SOLVED: To find the shape of an object by sweeping a surface of the object having a large dimension, while measuring it at a sensitivity of nanometer or sub-nanometer. SOLUTION: It is known that the force acting between an atom on the surface of the object and an atom of the probe is an attractive force that is stronger than Coulomb's force, and by making the cantilever for holding a probe resonate, by measuring vibration of the cantilever for holding the probe by an interferometer, and by finding the changes in the secondary higher harmonics of the resonance frequency contained in measured wave, from the interferometer, and finding the changes in the further higher higher-harmonics included therein, the cantilever and the other are moved to bring the intensity of a spectrum of the higher harmonics to constant values, and the surface of the object is swept thereby. COPYRIGHT: (C)2008,JPO&INPIT
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