| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-temperature plasma treatment apparatus for a long continuous film in which surface modification treatment by low-temperature plasma can be performed while maintaining the dimensional stability of the film without damaging it. SOLUTION: The apparatus for performing the surface modification treatment of the film comprises a first vacuum vessel equipped with an unwinder for continuously unwinding the film, a second vacuum vessel for performing plasma treatment, and a third vacuum vessel equipped with a winder for continuously winding the film after plasma treatment, wherein the vacuum vessels are connected in the machine direction of the film. COPYRIGHT: (C)2008,JPO&INPIT
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