| 摘要 |
Exposure systems are disclosed that suppress incidence of infrared radiation from a vacuum pump into a chamber in which exposures are performed under vacuum. An exemplary system includes a chamber, a vacuum pump, an evacuation duct connecting the pump to the chamber, and an infrared-radiation propagation-inhibiting device. The chamber accommodates "exposure components" of the exposure system. The vacuum pump evacuates gas from the chamber. The infrared-radiation propagation-inhibiting device is situated, for example, in the chamber, in an inlet from the chamber into the evacuation duct, and/or in the evacuation duct itself, and impedes the incidence of infrared radiation from the pump into the chamber.
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