| 摘要 |
PROBLEM TO BE SOLVED: To provide a factory employing locally-cleaned-robot carriages and a robot carriage type manufacturing method which so suppress the effects of cross contaminations and so realize mini-environment circumstances as to be accompanied thereby with high accuracy and high product-quality. SOLUTION: The factory employing locally-cleaned-robot carriages have: a plurality of manufacturing equipments 58i, 58i+1, 58i+2, 58i+3, ...; temporarily-preserved-vessel stores 52a, 52b; vessel discriminatively selecting equipment 53a, 53b; and an equipment-group controlling server 51. The temporary storages of vessels 52a, 52b preserve therein closed-form carrying vessels which so store intermediate products as to carry them. The vessel discriminatively selecting equipment 53a, 53b discriminates/selects carrying type 1 or carrying type 2 closed-form carrying vessels from the plurality of closed-form carrying vessels which are preserved in the temporary storages of vessel. The equipment-group controlling server 51 so controls the operations of the plurality of manufacturing equipment and the plurality of vessel discriminatively selecting equipment as to move the carrying type 2 closed-form carrying vessels in specific inter-process carrying paths, and as to move the carrying type 1 closed-form carrying vessels in inter-process carrying paths other than the specific inter-process carrying paths. COPYRIGHT: (C)2008,JPO&INPIT
|
