| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polyimide having a high glass transition temperature, a low dielectric constant, high transparency, low water absorption and alkali etching property and containing an alicyclic structure and an ester bond. SOLUTION: The polyesterimide comprises a constituent unit represented by general formula (4) [X<SP>1</SP>-X<SP>6</SP>are each a hydrogen atom, a halogen atom, a nitrile group, a nitro group, an alkyl group or the like; and Z is a divalent aromatic group or aliphatic group]. The polyesterimide is obtained by reacting an ester group-containing semi-alicyclic tetracarboxylic acid anhydride with a diamine to give a polyesterimide precursor and subjecting the precursor to cyclization reaction (imidation) by heating or using a dehydrating reagent. COPYRIGHT: (C)2008,JPO&INPIT
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