SLM STRUCTURE COMPRISING SEMICONDUCTING MATERIAL

摘要

We disclose a method for stabilizing against a drift of a deflection of a micromirror device having an electrostatic actuator, including the actions of: providing an actuator including at least two members beneath said micromirror and at least one electrode beneath said micromirror, at least one of said at least two members being formed of a semiconducting material, providing a surface layer on said at least one semiconducting member facing towards said other member of said actuator, said surface layer having a density of carriers being 10¹⁷ cm³ or higher.