发明名称 |
Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
摘要 |
Embodiments of the invention include a roll-to-roll atomic layer deposition (ALD) device. The device includes mechanisms to enable relative movement between a substrate to be deposited upon and various chambers containing ALD precursor gases.
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申请公布号 |
US2007281089(A1) |
申请公布日期 |
2007.12.06 |
申请号 |
US20060446077 |
申请日期 |
2006.06.05 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
HELLER CHRISTIAN MARIA ANTON;ERLAT AHMET GUN;BREITUNG ERIC MICHAEL |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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