| 摘要 |
A transmission filter apparatus for spatially dependent intensity filtering of an incident light distribution comprises at least one retardation device ( 23 ) that can be operated in transmission for the purpose of producing a spatially dependent retarding effect on the light of the incident light distribution, it being possible to drive the retardation device ( 23 ) in order to produce a temporally variable, spatially dependent retarding effect, and also comprises at least one polarization filter arrangement ( 24 ) arranged in the light path downstream of the retardation device. The transmission filter apparatus ( 22 ) is suitable, in particular, for use in illumination systems of microlithography projection exposure machines, since the transmission filtering effect can be set in a temporally variable fashion, and can therefore be tuned to the change in the illumination settings of the illumination system. An exposure method for a substrate can advantageously be carried out with the aid of an illumination system according to the invention.
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