METHOD AND APPARATUS FOR CONTROLLING FURNACE POSITION IN RESPONSE TO THERMAL EXPANSION

摘要

A compression system for an inductively heated pusher furnace controls movement of susceptors during thermal contraction thereof. The system includes a plurality of furnace sections each having a susceptor wherein each susceptor abuts an adjacent susceptor and wherein the susceptors include first and last susceptors. A compression plate abuts the first susceptor to apply force thereon toward the last susceptor to keep the susceptors in abutment with each other during contraction of the susceptors during cooling thereof. An actuator for moving the compression plate is preferably automatically controlled by a computerized control system. The susceptors together form a tunnel through which pusher plates travel and have overlapping joints which seal against the escape of gasses and allow for a degree of susceptor contraction without forming a gap therebetween even in the absence of compression of the susceptors.