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发明名称
Reflektives optisches Element und EUV-Lithographiegerät
摘要
申请公布号
DE112004000320(A5)
申请公布日期
2007.12.06
申请号
DE20041100320T
申请日期
2004.03.01
申请人
CARL ZEISS SMT AG
发明人
TRENKLER, JOHANN;MANN, HANS-JUERGEN;NOTHELFER, UDO
分类号
G21K1/06;G03F7/20
主分类号
G21K1/06
代理机构
代理人
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地址
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