发明名称 METAL OXIDE SEMICONDUCTOR FILMS, STRUCTURES AND METHODS
摘要 Materials and structures for improving the performance of semiconductor devices include ZnBeO alloy materials, ZnCdOSe alloy materials, ZnBeO alloy materials that may contain Mg for lattice matching purposes, and BeO material. The atomic fraction x of Be in the ZnBeO alloy system, namely, Zn1-XBeX0, can be varied to increase the energy band gap of ZnO to values larger than that of ZnO. The atomic fraction y of Cd and the atomic fraction z of Se in the ZnCdOSe alloy system, namely, Zn1-YCdYOi-ZSeZ, can be varied to decrease the energy band gap of ZnO to values smaller than that of ZnO. Each alloy formed can be undoped, or p-type or n-type doped, by use of selected dopant elements. These alloys can be used alone or in combination to form active photonic layers that can emit over a range of wavelength values, heterostructures such as single and multiple quantum wells and superlattice layers or cladding layers, and to fabricate optical and electronic semiconductor devices. These structures can be applied to improve the function, capability, and performance of semiconductor devices.
申请公布号 KR20070116080(A) 申请公布日期 2007.12.06
申请号 KR20077022971 申请日期 2007.10.08
申请人 MOXTRONICS, INC. 发明人 RYU, YUNG RYEL;LEE, TAE SEOK;WHITE HENRY W.
分类号 H01L33/28 主分类号 H01L33/28
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