发明名称 DEVICE FOR VAPORIZING MATERIALS WITH A VAPORIZER TUBE
摘要 A device for vaporizing materials, which includes a vaporizer tube or the like, is provided, wherein which the vaporizer tube includes at least one discharge port for the vaporized material, and the vaporizer tube is connected with a vapor distributor and comprises at least two separately heatable vaporizer units. As a device for vaporizing materials, comprising a vaporizer tube(3), the device is characterized in that the vaporizer tube includes at least one discharge port(85) for the vaporized material, and at least two vaporizer units(51-60) that are movable along a common axis relative to one another and disposed in parallel. The vaporizer units respectively include individual heaters(61-70). The device further comprises guide elements(30,80) for the vaporizer units, wherein at least one guide element(80) is movable. The guide elements are pistons which are at least partially surrounded by the vaporizer units in the form of tongs. The vaporizer units are disposed on a cylinder(26) which comes in contact with an inner portion of a wall(25) of the vaporizer tube. The device further comprises an insulation material(28) disposed between the cylinder and the vaporizer units disposed on the cylinder. The device further comprises insulation materials(50,71-79) disposed between the vaporizer units.
申请公布号 KR20070115806(A) 申请公布日期 2007.12.06
申请号 KR20070054499 申请日期 2007.06.04
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 HATTENDORF GUIDO
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址