NON-CONTACT TRANSPORT APPARATUS

摘要

A non-contact transport apparatus is provided to transport a material having a large scale without a deformation or warp by generating a desired negative pressure. A non-contact transport apparatus comprises an upper plate(14), a lower plate(18) and a guide member. The upper plate includes an air supplying part(12) and a flow passage(26) for flowing air supplied through the air supplying part. The lower plate is connected to the upper plate and has a plurality of discharging holes(16). The guide member is installed between the upper plate and the lower plate, and communicates with the flow passage and the discharging holes. The guide member guides the air to the radial outward direction of the upper and lower plates to generate negative pressure.