发明名称 OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
摘要 An optical deflector and an optical apparatus are provided to accurately adjust frequencies of characteristic vibration modes to target frequencies by changing heat radiations of four piezoelectric resistors. An optical deflector includes a vibration system(160), a driving unit and a driving control unit. The vibration system has plural characteristic vibration modes. The driving unit includes a vibrating unit, and the driving control unit supplies a driving signal to the driving unit. The vibration system includes a first vibrator actuator(11), a first twist spring(12), a second vibrator actuator(13), a second twist spring(14) and a support member(15). The optical deflector includes distortion detecting elements(25a,25b) and a heating element(19), such that a characteristic vibration mode frequency and a scanning state are stabilized.
申请公布号 KR20070115683(A) 申请公布日期 2007.12.06
申请号 KR20070052015 申请日期 2007.05.29
申请人 CANON KABUSHIKI KAISHA 发明人 KATO TAKAHISA;FURUKAWA YUKIO;SHIMADA YASUHIRO
分类号 G02B26/10 主分类号 G02B26/10
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