| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for ionizing clusters which ionize clusters efficiently, suppress the generation of monomer ions, and enable generation of cluster ions creating a large electric current. SOLUTION: According to the method for ionizing clusters, neutral clusters generated in a cluster generation chamber 1 are led through a schemer 4 and a cluster beam adjusting chamber 5 to an ionizing chamber 6, where the neutral clusters are ionized. The ionizing chamber 6 is separated from the cluster beam adjusting chamber 5 via a partition wall, and is exhausted through an exhaust port 8 formed on the ionizing chamber 6 to keep the interior of the ionizing chamber 6 lower in pressure than the interior of the cluster beam adjusting chamber 5 to ionize the neutral clusters. COPYRIGHT: (C)2008,JPO&INPIT
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