发明名称 Semiconductor device and fabrication thereof
摘要 A memory device is disclosed. A floating gate is disposed overlying a substrate. A tunneling dielectric layer is interposed between the floating gate and the substrate. An inter poly dielectric layer is disposed overlying the floating gate and the substrate. A word line is disposed overlying the floating gate, extending in a row direction. A bit line is disposed in the substrate, extending in a column direction, wherein the bit line is partially overlapped by the floating gate and the word line.
申请公布号 US2007278553(A1) 申请公布日期 2007.12.06
申请号 US20060437744 申请日期 2006.05.22
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 WU KOU-CHENG
分类号 H01L29/76;G11C16/04 主分类号 H01L29/76
代理机构 代理人
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