发明名称 Device Structures for Reducing Device Mismatch Due to Shallow Trench Isolation Induced Oxides Stresses
摘要 A circuit and method are disclosed for reducing device mismatch due to trench isolation related stress. One or more extended active regions are formed on the substrate, wherein the active regions being extended from one or more ends thereof, and one or more operational devices are placed on one or more active regions, wherein the extended active region has at least a length twice as much as a distance between gates of two neighboring operational devices.
申请公布号 US2007281398(A1) 申请公布日期 2007.12.06
申请号 US20070841791 申请日期 2007.08.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHUNG SHINE C.;LU DAVID
分类号 H01L21/335 主分类号 H01L21/335
代理机构 代理人
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