发明名称 |
ANTIREFLECTIVE COATING MATERIAL |
摘要 |
Antireflective coatings comprising (i) a silsesquioxane resin having the formula (PhSiO (3-x) /2 (OH) x) mHSiO (3-x) /2 (OH) x) n (MeSiO (3-x) /2 (OH) x) p where Ph is a phenyl group, Me is a methyl group, x has a value of 0, 1 or 2; m has a value of 0.01 to 0.99, n has a value of 0.01 to 0.99, p has a value of 0.01 to 0.99, and m + n + p = 1; (ii) a polyethylene oxide fluid; and (iii) a solvent; and a method of forming said antireflective coatings on an electronique device. |
申请公布号 |
WO2007094848(A3) |
申请公布日期 |
2007.12.06 |
申请号 |
WO2006US46810 |
申请日期 |
2006.12.07 |
申请人 |
DOW CORNING CORPORATION;FU, PENG-FEI;MOYER, ERIC, SCOTT |
发明人 |
FU, PENG-FEI;MOYER, ERIC, SCOTT |
分类号 |
G03F7/075;G03F7/09 |
主分类号 |
G03F7/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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