Piezo-actuator encapsulation manufacturing method involves applying electrical insulating layer on surface of piezo-actuator, where hermetically sealed surface layer is superimposed on insulating layer

摘要

The method involves applying an electrical insulating layer (10) on a surface (20) of a piezo-actuator (5), which runs parallel to its longitudinal or stacking direction (30). A hermetically sealed surface layer is superimposed on the insulating layer, so that the hermetically sealed surface layer covers the insulating layer in a plane. The insulating layer has an organic coating, preferably a polymer or elastomer coating and/or an inorganic coating, preferably of glasses, ceramics, oxides or nitrides. An independent claim is also included for a piezo-actuator with encapsulation, particularly a multilayer actuator.