发明名称 APPARATUS FOR MANUFACTURING FLAT PANEL DISPLAY
摘要 <p>An apparatus for manufacturing a flat panel display device is provided to implement uniformly the thickness of a photoresist film on a substrate by forming uniform beads. An apparatus for manufacturing a flat panel display device includes a slit nozzle(200), a conveying roller(500), and a correction part(410). The slit nozzle includes an exhausting part for spraying photoresist on a substrate. The conveying roller conveys the substrate. The correction part is positioned between the slit nozzle and conveying roller. One end of the correction part is positioned on the conveying roller. A part of the slit nozzle is inserted into the other end of the correction part and then a position correction is executed on the slit nozzle and conveying roller.</p>
申请公布号 KR100782538(B1) 申请公布日期 2007.12.06
申请号 KR20060137911 申请日期 2006.12.29
申请人 SEMES CO., LTD. 发明人 PARK, JONG MO
分类号 H01L21/027 主分类号 H01L21/027
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