发明名称 DIRECT TOOL LOADING
摘要 The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
申请公布号 KR20070116027(A) 申请公布日期 2007.12.06
申请号 KR20077022121 申请日期 2006.02.17
申请人 ASYST TECHNOLOGIES, INC. 发明人 BONORA ANTHONY C.;KROLAK MICHAEL;HINE ROGER G.
分类号 H01L21/00 主分类号 H01L21/00
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