| 摘要 |
A hollow lenticular filter (D, D') of very pure quartz, within which a liquid which carries away the heat irradiated by the lamp, which has the property of high permeability to UV and which maintains this property over time, such as for example distilled or otherwise purified water, is circulated continuously and over the shortest route, is located between the source (L) emitting the UV rays and the substrate (S) being irradiated. A further filter (20) manufactured using an interferometry technique through vacuum plasma deposition of suitable materials in ultrathin layers on the external surface of the quartz filter may be provided on the said surface of the lenticular filter facing the substrate (S) being irradiated, it being provided that this additional filter has transparency characteristics which differ with the frequencies involved so as to be highly permeable to UV radiation and instead reflect towards the cooling liquid a considerable part of the residual infrared radiation which would otherwise escape from the said cooling liquid. |
