发明名称 Protective layer in memory device and method therefore
摘要 <p>A method for protecting a non-volatile memory device, the method including forming a non-volatile memory device including a polycide structure formed over a non-conducting charge trapping layer, and forming a protective layer over at least a portion of the polycide structure, the protective layer being adapted to absorb electromagnetic wave energy having a wavelength shorter than visible light. A device constructed in accordance with the method is also disclosed.</p>
申请公布号 EP1313138(A3) 申请公布日期 2007.12.05
申请号 EP20020257954 申请日期 2002.11.19
申请人 SAIFUN SEMICONDUCTORS LTD. 发明人 BLOOM, ILAN;EITAN, BOAZ
分类号 H01L21/336;H01L21/8247;H01L21/28;H01L21/8246;H01L27/115;H01L29/51;H01L29/788;H01L29/792 主分类号 H01L21/336
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