发明名称 Workpiece centering apparatus and method of centering workpiece
摘要 <p>The workpiece centering apparatus is capable of highly reducing damage of a workpiece (W). The workpiece centering apparatus comprises: a guide plate (50) being provided in a tray (40) and covering a water inlet (45) so as to horizontally introduce water into the tray (40); and at least three overflow outlets (54) for overflowing the water from the tray (40), the overflow outlets (54) being formed in a peripheral wall (41) of the tray and arranged in the circumferential direction at regular intervals. The workpiece (W), which is horizontally fed on a surface of the water stored in the tray (40), is received and floated by surface tension of the water. Then, the workpiece (W) is centered in the tray (40) by water flows radially overflowing from the tray (40) via the overflow outlets (54).</p>
申请公布号 EP1862259(A1) 申请公布日期 2007.12.05
申请号 EP20070252154 申请日期 2007.05.25
申请人 FUJIKOSHI MACHINERY CORP. 发明人 MIYASHITA, TADAKAZU;KANAI, YOSUKE
分类号 B24B37/04;H01L21/304;H01L21/687 主分类号 B24B37/04
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