发明名称 Vaporizer and method of vaporizing a liquid for thin film delivery
摘要 A vaporizer (10) including an inlet (12) for liquid and an outlet (14) for gas, a gas valve (16) controlling gas flow to the outlet (14) of the vaporizer (10), and means (20) for heating liquid flowing between the liquid inlet (12) and the gas valve (16). The vaporizer (10) also includes means (18) for increasing a heat transfer rate of the liquid flowing between the liquid inlet and the gas valve, and for causing a pressure drop in the liquid so that a pressure of the liquid drops below a vapor transition pressure of the liquid upon reaching the gas valve. The pressure drop occurs under isothermal conditions, and the liquid is vaporized on demand only when the valve (16) is opened. The means (18) for increasing a heat transfer rate and for causing a pressure drop can be a plug of porous media.
申请公布号 GB2438807(A) 申请公布日期 2007.12.05
申请号 GB20070019261 申请日期 2006.03.03
申请人 MKS INSTRUMENTS, INC. 发明人 PAUL MENEGHINI;ALI SHAJII;DANIEL SMITH;WILLIAM CLARK
分类号 C23C16/448;B01B1/00;C23C16/455 主分类号 C23C16/448
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