发明名称 |
Multi-functional cyclic siloxane compound, siloxane-based polymer prepared from the compound and process for preparing dielectric film by using the polymer |
摘要 |
<p>Disclosed herein are a multi-functional cyclic siloxane compound (A), a siloxane-based (co)polymer prepared from the compound (A), or the compound (A) and at least one of Si monomer having organic bridges(B), acyclic alkoxy silane monomer(C), and linear siloxane monomer (D); and a process for preparing a dielectric film using the polymer. The siloxane compound of the present invention is highly reactive, so the polymer prepared from the compound is excellent in mechanical properties, thermal stability and crack resistance, and has low dielectric constant resulting from compatibility with conventional pore-generating materials. Furthermore, low content of carbon and high content of SiO2 make enhance applicability to the process of semiconductor, therefore, this film is of great use as a dielectric film.</p> |
申请公布号 |
EP1493746(B1) |
申请公布日期 |
2007.12.05 |
申请号 |
EP20040253848 |
申请日期 |
2004.06.28 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD |
发明人 |
SHIN, HYEON JIN;JEONG, HYUN DAM;SEON, JONG BAEK;MAH, SANG KOOK;YIM, JIN HEONG;LEE, JAE JUN;LEE, KWANG HEE;KIM, JUNG BAE |
分类号 |
C07F7/18;C07F7/21;C08G77/14;H01L21/312 |
主分类号 |
C07F7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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