| 摘要 |
An apparatus for detecting unbalance of a scan encoder in ion implantation equipment is provided to align correctly the scan encoder by forming an unbalance sensing unit therein. A scan encoder(300) provides a standard of a scan position within ion implantation equipment in a processing state. An encoder reader head(320) is moved linearly on the basis of the scan encoder. When the scan encoder is not aligned to a center of the encoder reader, an apparatus for detecting unbalance of a scan encoder is formed to sense an aligning state of the scan encoder. The apparatus for detecting unbalance of a scan encoder includes a noise sensing part(340) for sensing noise in a linear movement of the encoder reader head, and an alarm generating part(350) for generating alarm sound when sensing an abnormal state of the noise sensing part.
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