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发明名称
IMPROVED SEMICONDUCTOR STRESS BUFFER COATING EDGE BEAD REMOVAL COMPOSITIONS AND METHOD FOR THEIR USE
摘要
申请公布号
EP1554033(A4)
申请公布日期
2007.12.05
申请号
EP20030715984
申请日期
2003.02.06
申请人
FUJIFILM ELECTRONIC MATERIALS USA, INC.
发明人
PETERSON, LAURIE, J.;HOPLA, RICHARD, L.;NAIINI, AHMAD, A.;WEBER, WILLIAM, D.;WATERSON, PAMELA, J.
分类号
G03F7/42;C11D7/26;C11D7/50;C11D11/00;G03F7/16;G03F7/20;H01L21/027;H01L21/308;H01L21/311;(IPC1-7):B01F1/00;C23G5/00;B05D1/42
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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