发明名称 |
Self correcting multiple-link fuse |
摘要 |
An improved fuse link structure and fuse blowing method, the fuse-link structure including a plurality of elongated fuse-link members comprising polysilicon electrically connected in parallel according to a common input Voltage contact and common output current contact to form a fuse-link structure; and, wherein at least a portion of the plurality of elongated fuse-link comprise a different electrical resistance with respect to one another according to a variable condition selected from the group consisting of critical dimension, polysilicon doping condition, and silicide agglomeration condition.
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申请公布号 |
US7304366(B2) |
申请公布日期 |
2007.12.04 |
申请号 |
US20040910008 |
申请日期 |
2004.08.02 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
WU SHIEH-YANG;CHEN SHI-BAI |
分类号 |
H01L29/00;G11C17/00;H01L21/82 |
主分类号 |
H01L29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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