| 摘要 |
An FPD(Flat Panel Display) glass substrate bonding device for uniformly bonding a large glass substrate is provided to supply a plurality of pneumatic pressing devices to press a plurality of portions of an upper plate of the bonding device to bond an upper glass substrate and a lower glass substrate by a uniform force. An upper plate(40) is placed at an upper part within a vacuum chamber(20) and absorbs a top surface of an upper glass substrate(43). A lower plate(50) is placed at a lower part within the vacuum chamber to face the upper substrate, and absorbs a bottom surface of a lower glass substrate(53). A plurality of pneumatic pressing devices(31,32) is installed outside the vacuum chamber and penetrates the vacuum chamber to be connected to the upper plate, and presses a plurality of portions of the upper plate by air pressure. |
