SEMICONDUCTOR MEMORY DEVICES HAVING FUSES AND METHODS OF FORMING THE SAME

摘要

A semiconductor memory device having a fuse and a method for forming the same are provided to suppress contamination due to an opening by removing the opening for exposing a fuse. A substrate(100) includes a fuse region. A fuse isolation layer(105a) is arranged on the fuse region in order to define a fuse activation region. A fuse recess region is formed on the fuse activation region. A fuse conductor(130a) is arranged on the fuse recess region. A fuse insulating layer(125a) is inserted between a lateral surface and a bottom surface of the fuse recess region and the fuse conductor. A fuse doping region(140) is formed on the fuse activation region adjacent to the fuse conductor by inserting the fuse insulating layer.