| 摘要 |
A microscope device for efficiently supplying/recovering liquid at observing by means of local immersion, the device comprising an object lens (22) in an immersion system, an ejecting means for ejecting liquid to between the tip end (51) of the object lens and a substrate, and a sucking means for sucking liquid. Inclined surfaces (52, 53) are provided surrounding the tip end of the object lens at two portions respectively adjacent to the tip end, and a protrusion (54) projecting from the inclined surfaces toward the object side of the object lens is provided at a portion adjacent to the inclines surfaces. One inclined surface (52) forms an opening that extends from the tip end to the side surface of the object lens and is surrounded at the side surface by the protrusion and the substrate. The ejecting means contains a tubular member (23) provided on the inclined surface (52) and uses the tubular member to eject liquid, the width of the tubular member being smaller than that of the inclined surface (52). The sucking means contains a tubular member (24) provided on the other inclined surface (53) and uses the tubular member (24) to suck liquid while sucking air through the opening, the width of the tubular member being larger than that of the tubular member (23).
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