PUMP UNIT FOR FEEDING CHEMICAL LIQUID

摘要

A pump unit for feeding a chemical liquid capable of reducing the stagnation of air bubbles and chemical liquid in the chemical liquid flow passage of the unit while reducing a size by unitizing a pump and open/close valves on the upstream and downstream sides of the pump. The pump unit (10) is formed by integrally mounting a suction side flow passage member (17) to which a suction side cut-off valve (13) is integrally fitted and a discharge side flow passage member (18) to which a discharge side cut-off valve (14) is integrally fitted on the pump (11) (pump housings (21), (22)). Suction passages (17a) and (21b) and discharge passages (18a) and (21c) communicating with a pump chamber (25) are positioned on a same straightline (L1).