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发明名称
SUBSTRATE PROCESSING DEVICE
摘要
申请公布号
KR100781407(B1)
申请公布日期
2007.12.03
申请号
KR20067018784
申请日期
2006.09.13
申请人
发明人
分类号
H01L21/205;B01J4/00;G05D7/06;H01L21/02;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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