| 摘要 |
[Problems] To provide a method for forming a carbon film homogeneously at a low cost and in a low power consumption. [Means for Solving the Problems] This carbon film forming method comprises the step of arranging a cylindrical member having an opening at its portion, in a vacuum chamber, the step of arranging a substrate in the cylindrical member, the step of introducing a carbon film forming gas into the vacuum chamber, and the step of applying a plasma generating voltage to the cylindrical member, to generate a plasma in the cylindrical member thereby to form the carbon film on the surface of the substrate by that plasma. |
