| 摘要 |
A substrate transferring apparatus and a substrate processing system using the same are provided to reduce the time for transferring a plurality of substrates, by continuously loading/unloading the substrates to/from a process chamber. A substrate transferring apparatus comprises a substrate standby station(310) and a plate transferring unit(530). The substrate standby station includes one or more transferring plates(330) for transferring substrates and a transferring plate installing unit(320) at which the transferring plates are installed. The plate transferring unit loads substrates to be processed on susceptors(511-514) of a process chamber, and unloads processed substrates from the susceptors, by using the transferring plates. |
