发明名称 OXIDE STRUCTURE USEABLE FOR OPTICAL WAVEGUIDE AND METHOD OF FORMING THE OXIDE STRUCTURE
摘要 A METHOD OF FORMING AN OXIDE STRUCTURE AND AN OXIDE STRUCTURE FORMED BY THE METHOD. IN ONE EMBODIMENT A LOWER CLADDING LAYER ON A SUBSTRATE IS PROVIDED. AT LEAST ONE CORE LAYER IS FORMED ON LOWER CLADDING LAYER, THE CORE LAYER INCLUDES BORON AT A CONCENTRATION THAT PRODUCES SUBSTANTIALLY ZERO INTERNAL STRESS OF SAID CORE LAYER. AT LEAST ONE UPPER CLADDING LAYER IS FORMED ON THE CORE LAYER WHEREIN AT LEAST ONE OF THE UPPER AND LOWER CLADDING LAYERS INCLUDE GERMANIUM AT A CONCENTRATION LEVEL SUCH THAT THE UPPER AND LOWER CLADDING LAYERS EXHIBIT SUBSTANTIALLY EQUIVALENT REFRACTIVE INDICES.
申请公布号 MY134020(A) 申请公布日期 2007.11.30
申请号 MYPI20022907 申请日期 2002.08.02
申请人 ASML US, INC. 发明人 MARTIN MOGAARD
分类号 G02B6/12;G02B6/134;C01B13/14;C03B19/14;C23C16/40;G02B6/13 主分类号 G02B6/12
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