DUAL ULTRAVIOLET IRRADIATION EQUIPMENT

摘要

A dual UV(Ultra Violet) irradiating apparatus is provided to perform UV irradiation on various sized wafers by changing a scan range of the UV irradiation according to size of the wafers using a wafer feeding rail. Plural loader units load a wafer cassette. Plural transfer units transfer the wafer cassettes loaded into the loader unit to an entrance of a UV irradiation region. Plural grippers receive/withdraw the wafer in the wafer cassette transferred to the entrance of the UV irradiation region into/out the UV irradiation region. A UV irradiation unit irradiates UV light to two wafers received in the UV irradiation region at one time. The transfer units are respectively driven by using a sub-motor. The UV irradiation region includes a wafer feeding rail. The wafer feeding rail controls a width thereof according to size of the received wafer to guide it.