摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a piezoelectric pump excellent in the durability and reliability of electric wiring for a piezoelectric oscillator in the piezoelectric pump which comprises the piezoelectric oscillator composed by laminating a piezoelectric body on at least either of front and rear surfaces of a shim composed of a conductive metal thin plate, and a housing which forms a variable capacity chamber by making the rim of the piezoelectric oscillator liquid-tight, and can obtain pumping operation by applying an alternate current between the shim of the piezoelectric oscillator and the piezoelectric body and oscillating the piezoelectric oscillator. <P>SOLUTION: The piezoelectric pump is constituted in such a manner that: a power feeding means for imparting an alternate current to the piezoelectric oscillator is constituted of a power feeding FPC formed by embedding a shim power feeder and piezoelectric body power feeder in an insulated coating, and the shim power feeder and the piezoelectric body power feeder are directly and conductively connected to the shim and the piezoelectric body, respectively. "Directly" means that the power feeder in the power feeding FPC is connected without using a terminal as an independent body. <P>COPYRIGHT: (C)2008,JPO&INPIT |