发明名称 MASK FOR FORMING ORGANIC EL ELEMENT, ORGANIC EL ELEMENT FORMING METHOD, AND ORGANIC EL ELEMENT FORMING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a mask or the like for forming an organic EL element excelling in practicability achieving a frameless structure in covering the surface of a large-sized substrate using a plurality of masks. SOLUTION: The mask for forming the organic EL element provided with a metal layer 3 on the surface by a plating method is provided with a defined region 4 having no metal layer 3 at a part of a mask surface provided with the metal layer 3, and a mask side alignment mark 5 formed of the metal layer 3 in the region 4, and constituted top make alignment adjustment using the mask side alignment mark 5 and a substrate side alignment mark 6 provided at the substrate 1. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007311257(A) 申请公布日期 2007.11.29
申请号 JP20060140703 申请日期 2006.05.19
申请人 TOKKI CORP 发明人 HIRAGA YASUHIDE
分类号 H05B33/10;C23C14/04;H01L51/50 主分类号 H05B33/10
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