| 摘要 |
A substrate conveying apparatus, a substrate treating system, and a substrate conveying method are provided to improve the throughput thereof by carrying a substrate more rapidly. A substrate conveying apparatus carries a plurality of substrates from a first substrate receiving part to a second substrate receiving part. The substrate conveying apparatus includes a fork supporting unit(53) and a plurality of forks(54a). The fork supporting unit is movable up and down with respect to the first and the second substrate receiving parts. The forks are installed on the fork supporting unit to move independently in a horizontal direction, where the forks are located apart from each other as much as a previously set fork pitch(P3) in a vertical direction. The forks move up by an extraction stroke amount(ST1) to lift the substrates when extracting the substrates from the first substrate receiving part. The fork pitch is set to the sum of a first pitch(P1) and the extraction stroke amount(ST1).
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