| 摘要 |
<P>PROBLEM TO BE SOLVED: To raise crystallinity of a lower electrode formed on a substrate and to raise crystal orientation of piezoelectric thin film formed on the lower electrode in order to raise an electromechanical coupling coefficient when a bulk elastic wave element is used as a resonator. <P>SOLUTION: Crystal whose surface 7 is a ä111} surface is used as the substrate 2, the lower electrode 4 consisting of metal thin film of face-centered cubic structure in which the ä111} surface is grown in parallel with the substrate surface 7 is formed on the substrate 2, the piezoelectric thin film 5 whose polarization axis grows in the direction of normal of the substrate 2 is formed on the lower electrode 4 and an upper electrode 6 is formed so as to oppose to the lower electrode 4 via the piezoelectric thin film 5. <P>COPYRIGHT: (C)2008,JPO&INPIT |
